Application Solutions
Advanced Logic Manufacturing Solution
Complete etching and deposition solution for advanced logic device manufacturing including FinFET and GAA transistor fabrication
Atomic-Level Precision
Multi-Patterning Support
High Selectivity
3D NAND Manufacturing Solution
High aspect ratio etching solution for 3D NAND memory manufacturing including channel hole and staircase etching
Extreme Aspect Ratio Capability
High Productivity
Excellent Profile Control